Session CC

Session CC: SAW Fabrication

Chair: K. Yamanouch, Tohoku University
Pecan, 4:00 p.m. - 5:30 p.m., Tuesday, November 5 ,1996, Hyatt Regency Hotel.

4:00 p.m. STD CC-1 Production Trimming of SAW Devices Using CF4 Chemistry and Its Effects on SAW Characteristics
R. Subramanian, K. Qin, and P.V. Wright, RF Monolithics, Dallas, TX

4:15 p.m. SFT CC-2 10 GHz Range Low Loss Wide Band Unidirectional SAW Filters Using Sub-0.1-Micron Width Narrow-Gap Electrodes
H.Odagawa, T.Tsuji , and K.Yamanouchi, Research Institute of Electrical Communication, Tohoku University, Sendai 980-77, Japan

4:30 p.m. SDR CC-3 Design, Fabrication, and Applications of Precise Delay Lines at 2.45 GHz
Clemens C.W. Ruppel, Leonhard Reindl, Stefan Berek, and Ulrich Knauer, Siemens AG, Munchen, Germany

4:45 p.m. SFT CC-4 Experimental Investigation on the Operation of SAW Devices at Harmonic Frequencies with Stepped-Finger Interdigital Transducer
T. Sato, S. Otsuka, H. Okajima, and R. Motegi, Tokimec, Inc., Tokyo, Japan

5:00 p.m. STD CC-5 High Frequency SAW Devices Fabricated by Reactive Ion Etch Technology
R. Subramanian, K. Qin, and P.V. Wright, RF Monolithics, Dallas, TX

5:15 p.m. SDR CC-6 The Influence of Transducer Metalization on SAW Resonator Electrical Performance
J.W. Zhu*, G.K. Montress, J.A. Greer**, D. Andres***, and T.E. Parker****, Raytheon, Lexington, MA, * Now at J.P.Morgan,Singapore,**Now atEpion,Bedford,MA,***Now at Texas Inst.,Mansfield,MA,****Now at NIST,CO

4:00 p.m.	STD	CC-1	Production Trimming of SAW Devices Using CF4 Chemistry and Its Effects on SAW Characteristics	R. Subramanian, K. Qin, and P.V. Wright, RF Monolithics, Dallas, TX
4:15 p.m.	SFT	CC-2	10 GHz Range Low Loss Wide Band Unidirectional SAW Filters Using Sub-0.1-Micron Width Narrow-Gap Electrodes	H.Odagawa, T.Tsuji , and K.Yamanouchi, Research Institute of Electrical Communication, Tohoku University, Sendai 980-77, Japan
4:30 p.m.	SDR	CC-3	Design, Fabrication, and Applications of Precise Delay Lines at 2.45 GHz	Clemens C.W. Ruppel, Leonhard Reindl, Stefan Berek, and Ulrich Knauer, Siemens AG, Munchen, Germany
4:45 p.m.	SFT	CC-4	Experimental Investigation on the Operation of SAW Devices at Harmonic Frequencies with Stepped-Finger Interdigital Transducer	T. Sato, S. Otsuka, H. Okajima, and R. Motegi, Tokimec, Inc., Tokyo, Japan
5:00 p.m.	STD	CC-5	High Frequency SAW Devices Fabricated by Reactive Ion Etch Technology	R. Subramanian, K. Qin, and P.V. Wright, RF Monolithics, Dallas, TX
5:15 p.m.	SDR	CC-6	The Influence of Transducer Metalization on SAW Resonator Electrical Performance	J.W. Zhu, G.K. Montress, J.A. Greer, D. Andres, and T.E. Parker*, Raytheon, Lexington, MA, Now at J.P.Morgan,Singapore,Now atEpion,Bedford,MA,Now at Texas Inst.,Mansfield,MA,***Now at NIST,CO

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