Session II: Gas Phase Chemical Sensors

Chair: J. Schoenwald, Rockwell Corp.
Chula Vista, 11:00 a.m. - 12:30 p.m., Wednesday, November 6 ,1996, Hyatt Regency Hotel.

11:00 a.m. INV II-1 Invited Talk
Steve Martin
11:30 a.m. STD II-2 A Micromachined Surface Acoustic Wave Sensor for Detecting Inert Gases
S. Ahuja, M. Hersam, H.T. Chien, and A.C. Raptis, Energy Technology Division, Argonne National Laboratory, Argonne, IL
11:45 a.m. NST II-3 Chemical Sensors Based on SAW Resonators Working at up to 1 GHz
G. Fischerauer 1), F. Dickert 2), P. Forth 2), U. Knauer 1) 1) Siemens Corporate Research and Development, Munchen, Germany 2) Institut fur Analytische Chemie, Technische Universitat Wien, Austria
12:00 noon SAE II-4 SAW INTERFEROMETERS USING MICROMACHINED SILICON PLATES
A. H. Meitzler and E. N. Sickafus, Ford Research Lab., P.O. Box 2053, Dearborn, MI 48121; B. Costello and S.W. Wenzel, Berkeley Microinstruments, Inc. 1301 S. 46th St. Bldg. 164, Richmond, CA 94804
12:15 p.m. SAE II-5 Surface Acoustic Wave Humidity Sensor Based on Changes in Viscoelastic Properties of a Polymer Thin Film
N.M. Tashtoush, N. Eddy, J.D.N. Cheeke, Concordia Univ., Montreal, Canada



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