| 2:00 p.m. | INV | Y-1 | "MEASUREMENT TECHNIQUES FOR EVALUATING PIEZOELECTRIC THIN FILMS
| F. S. Hickernell, Motorola Government and Space Technology Group, Scottsdale, AZ 85252 |
|---|---|---|---|---|
| 2:30 p.m. | STD | Y-2 | PREPARATION OF TEXTURED LiNbO3 THIN FILMS BY OFF-AXIS LASER DEPOSITION AND THEIR CHARACTERIZATION
| K.Kaemmer, K.Franke, B.Holzapfel, D.Stephan, and M.Weihnacht, Institut fuer Festkoerper- und Werkstofforschung Dresden, Postfach, D-01171 Dresden, Germany |
| 2:45 p.m. | SFT | Y-3 | STUDY ON SAW WAVEGUIDE FABRICATED WITH PECVD SiN THIN FILMS
| S. G. Kim, T. G. Lee, and K. R. LEE*, DAEWOO Electronic Component Company LTD., Jeong-Eup-Si, ChunPuk, 580-100, Korea, *Institute for Advanced Engineering, Yongin-Si, Kyonggi-Do, 449-800, Korea |
| 3:00 p.m. | INV | Y-4 | Piezoelectric LiNbO3 and LiTaO3 Films for SAW Devices and Applications
| Y. Shibata, N. Kuze, M. Matsui, K. Kaya*, M. Kanai**, and T. Kawai**, Central Lab., *Elec. Mat. Lab, Asahi Chemical Ind., Shizuoka, Japan, **Osaka Univ.,Osaka, Japan |
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